,Influence of Vacuum Organic Contaminations on Laser-Induced Damage of 1064 nm Anti-Reflective Coati

• 作 者: CUI Yun LIU Shi-Jie HE Hong-Bo ZHAO Yuan-An SHAO Jian-Da FAN Zheng-Xiu
• 机 构: Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800“,”Grad
• 出 处: 中国物理快报（英文版）
• 发表日期: 2007年10期

We investigate the influence of vacuum organic contaminations on laser-induced damage threshold (LIDT) of optical coatings. Anti-reflective (AR) coatings at 1064nm made by Ta2O5/SiO2 are deposited by the ion beam sputtering method. The LIDTs of AR coatings are measured in vacuum and in atmosphere, respectively. It is exhibited that contaminations in vacuum are easily to be absorbed onto optical surface because of lower pressure,and they become origins of damage, resulting in the decrease of LIDT from 24.5 J/cm2 in air to 15.7J/cm2 in vacuum. The LIDT of coatings in vacuum has is slightly changed compared with the value in atmosphere after the organic contaminations are wiped off. These results indicate that organic contaminations are the main reason of the LIDT decrease in vacuum. Additionally, damage morphologies have distinct changes from vacuum to atmosphere because of the differences between the residual stress and thermal decomposability of filmy materials.