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采用一种改进的热丝 CVD系统沉积金刚石膜。在传统热丝 CVD腔中设置一套红外线发 生器，中心波长 3.5μ m,处于氢与甲烷分子拉伸振动吸收峰位置。由于共振吸收能量使反应气 体分解加强 ,在反应区获得较高浓度的原子氢和活性碳氢基团，使金刚石膜的生长速率和品质得到了提高。
Diamond film was deposited using an improved hot filament CVD system. In the traditional hot wire CVD chamber set a set of infrared generator, the central wavelength 3.5μm, hydrogen and methane molecular stretching vibration absorption peak position. Due to the resonance absorption energy to enhance the decomposition of the reaction gas, higher concentration of atomic hydrogen and active hydrocarbon groups are obtained in the reaction zone, so that the growth rate and quality of the diamond film are improved.