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用射频溅射法制备出了PTC-BaTiO_3薄膜,基片为Al_2O_3和石英玻璃,基片温度为400～500℃,溅射气氛为纯氧气。试验结果表明不经后续热处理薄膜即具有PTC效应。测试了薄膜的阻温特性、化学组成、厚度及沉积方式。
The PTC-BaTiO_3 thin films were prepared by radio frequency sputtering. The substrates were Al 2 O 3 and quartz glass. The substrate temperature was 400-500 ℃ and the sputtering atmosphere was pure oxygen. The test results show that the film has PTC effect without subsequent heat treatment. The film was tested for its resistance to temperature, chemical composition, thickness and deposition method.