论文部分内容阅读
由于目前平面制造技术不能提供所需要的性能,故微波集成电路的设计者和使用者通常都采用混合线路。意外的是,在这里最新的技术失败了,而通常用来喷涂飞机发动机零件保护层的老技术却可以最终解决长期追求的单片型高频线路的关键。应用等离子弧喷涂的方法可以产生各种用途的低损耗膜。等离子弧喷涂之所以如此吸引人,是因为它能广泛的被用来处理各种材料。而且它兼有薄膜沉积工艺生成高质量膜和厚膜加工生产速率高的能力。能用等离子弧处理的材料是:作带状线和
Due to the current flat-panel manufacturing technology can not provide the required performance, so microwave integrated circuit designers and users are usually mixed lines. Unexpectedly, the latest technology failed here, and the old techniques commonly used to coat aircraft engine parts protectors could ultimately solve the longstanding monolithic high-frequency line. Application of plasma arc spraying method can produce a variety of uses low loss film. Plasma arc spraying is so attractive because it is widely used to treat a variety of materials. And it combines the thin film deposition process to produce high quality film and thick film processing capacity of high production rate. Materials that can be processed with plasma arcs are: stripline and