论文部分内容阅读
成功地研制了一套过滤式阴极电弧沉积设备,并利用该设备成功获得了类金刚石薄膜.类金刚石薄膜的扫描电镜分析表明:获得的薄膜在硅基片上是光滑和致密的,在Ti合金基片上有裂纹,高速钢基片上有微孔.原子力显微镜分析表明:膜层的表面粗糙度与沉积参数密切相关.喇曼光谱研究表明,这种薄膜是典型的无氢类金刚石薄膜,喇曼光谱的高斯分解表明:随着偏压的变化,D线和G线的位置μ_D、μ_C向低频移动,半高宽σ_D减小.
Successfully developed a filter cathode arc deposition equipment, and the use of the device successfully obtained diamond-like carbon films. Scanning electron microscope analysis of diamond-like carbon films showed that: the obtained film is smooth and dense on the silicon substrate, in the Ti alloy base Micro-cracks were observed on the high-speed steel substrate by atomic force microscopy.The results of atomic force microscopy showed that the surface roughness of the film was closely related to the deposition parameters.The results of Raman spectroscopy showed that this film is a typical hydrogen-free diamond-like carbon film, Raman spectrum Gaussian decomposition shows that with the change of bias voltage, the positions of D line and G line move to low frequency, and the half-height width σ_D decreases.