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目前在全世界范围内,尤其是在日本、德国和美国,掀起了一股开发微机电技术的热潮,促使机电产品不断向小型化和实用化方向发展。东京大学机器人研究所已试制了用镍做翅膀的机械昆虫。这种“昆虫”在交流磁场的作用下能飞行数厘米,可用于温室内植物的授粉和除虫。丰田等日本企业已经试制成功了直径仅1～2毫米的静电马达和太阳能电池,直径5毫米的机器人也已问世。德国科学家试制成功了重0.5克、能飞行13厘米、可降落在米粒上的双旋翼“迷你”直升机。他
Currently in the world, especially in Japan, Germany and the United States, set off a wave of development of MEMS technology boom, prompting the continuous development of mechanical and electrical products to the miniaturization and practical direction. Robotics Institute at Tokyo University has made mechanical insect wings made of nickel. This “insect” can fly a few centimeters under the action of an alternating magnetic field and can be used for pollination and insecticide removal in greenhouse plants. Japanese companies such as Toyota have successfully prototyped electrostatic motors and solar cells with diameters of only 1 to 2 millimeters and robots with a diameter of 5 millimeters have also come out. German scientists successfully trial produced 0.5 grams, can fly 13 cm, can land on the rice on the dirigible “mini” helicopters. he