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微区低含量碳、氮等超轻元素的定量分析在材料研究中有着重要意义。在低含量碳电子探针定量分析方法研究的基础上,进一步开展了低含量氮的电子探针定量分析工作。本方法着眼于提高分析精度、准确度、降低检测极限。通过实践检验,得到了令人满意的结果。一、操作参数选择:1.加速电压:由于轻元素X射线的电离分布函数与重元素不同,同时,轻元素特征X射
Quantitative analysis of low light carbon, nitrogen and other superfine elements in the micro-region is of great significance in material research. On the basis of the quantitative analysis of low-level carbon-based electron probe, further quantitative analysis of low-level nitrogen electron probe has been carried out. This method aims to improve the analysis accuracy, accuracy and reduce the detection limit. Through the test of practice, satisfactory results have been obtained. First, the operating parameters of choice: 1. Accelerating voltage: Because of the light element X-ray ionization distribution function and heavy elements are different, at the same time, the light element features X-ray