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软X射线多层膜经常在强光束的照射下,做为反射镜使用。由于同步辐射等强光束携带很高的能量,使软X射线多层膜镜在工作时的温升可达几百度。软X射线多层膜为亚稳结构,周期仅为纳米量级,如此高的温升会对其周期结构造成不同程度的破坏,从而使反射率降低,反射率峰值位置漂移。因此,研究软X射线多层膜的结构热稳定性,对寻求软X射线多层膜的结构稳定性的改善方法具有重要意义。本文通过对Co/C,CoN/CN软X射线多层膜的周期结构热稳定性的对比研究,发现掺杂N可以十分有效地改善Co/C软X射线多层膜的周期结构热稳定性。
Soft X-ray multi-layer film is often used as a reflector under strong beam illumination. Due to the high energy of the strong beam such as synchrotron radiation, the temperature rise of the soft X-ray multilayer mirror at work can reach several hundred degrees. The soft X-ray multilayer is a metastable structure with a period of only nanometer. Such a high temperature rise will destroy the periodic structure to some extent, so that the reflectivity decreases and the reflectivity peak shifts. Therefore, studying the structural thermal stability of soft X-ray multilayers is of great importance to the improvement of the structural stability of soft X-ray multilayers. In this paper, by comparing the thermal stability of the periodic structures of Co / C, CoN / CN soft X-ray multilayer films, it is found that the doping N can effectively improve the thermal stability of the periodic structure of Co / C soft X-ray multilayer films .