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The dynamic behaviour for nanoscale electrostatic actuators is studied.A two parameter mass-spring model is shown to exhibit a bifurcation from the case excluding an equilibrium point to the case including two equilibrium points as the geometrical dimensions of the device are altered.Stability analysis shows that one is a stable Hopf bifurcation point and the other is an unstable saddle point.In addition,we plot the diagram phases,which have periodic orbits around the Hopf point and a homoclinic orbit passing though the unstable saddle point.