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氦质谱检漏法是目前使用最多、灵敏度最高的一种检漏方法。这种方法又可分为抽空法和加压法。所谓抽空法就是将被检件与检漏阀相连,利用检漏仪的抽气系统或专门设计的抽气系统将被检件内腔抽空,然后在被检件外部焊缝处施以氦气(喷吹法或氦罩法)。在一个大气压的压差作用下,氦气便通过漏孔进入被检件内腔并传输到检漏仪中,使检漏仪输出指示发生变化(如图1所示)。所谓加压法就是被检件内充以高压氦—空气混合气,氦—空气混合气在压差(1～几个气压)的作用下通过漏孔向外部大气中逸出,被检件外部用一种叫嗅敏
Helium mass spectrometry leak detection method is currently the most used, the highest sensitivity of a leak detection method. This method can be divided into time and pressure method. The so-called evacuation method is to be seized pieces and connected to the leak detection valve, the exhaust system leak detector or exhaust system designed to be inspected by the cavity, and then applied to the external weld at the helium application (Blowing method or helium hood method). At an atmospheric pressure differential, helium gas leaks through the leak into the specimen cavity and into the leak detector, so that the leak indicator output changes (as shown in Figure 1). The so-called compression method is to be filled with high-pressure helium-air mixture was seized, helium-air mixture in the pressure difference (1 ~ several air pressure) through the leak to the outside atmosphere through the leak, was seized outside Use a kind of smell sensitive