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自控成本（COO）分析法，作为一种对所购设备进行潜在成本─效益平衡评价的工具，已开始为半导体产业界所接受。但是，该方法仅被优化用于传统的大规模硅片制造厂。而且标准的COO分析模型通常应用于单道工序（即，单台设备的替换比较）。本文旨在揭示柔性生产对采用现行COO模型的各种分析方法的影响。同时探讨COO分析方法的延伸，以更好地处理柔性生产环境中的成本效益问题。柔性生产环境可力。快生产周期，提高设备的再利用率，同时具有强大的计算机集成制造能力。
Cost-controlled (COO) analytics, as a tool for evaluating the potential cost-benefit balance of purchased equipment, has begun to be accepted by the semiconductor industry. However, this method is only optimized for use with conventional large-scale wafer fabs. And the standard COO analysis model is usually applied to a single pass (ie a single device replacement comparison). This article aims to reveal the impact of flexible production on the various analytical approaches that use the current COO model. It also explores the extension of COO analysis methods to better address the cost-effectiveness issues in a flexible production environment. Flexible production environment capable. Fast production cycle, improve equipment re-use rate, at the same time has a strong computer integrated manufacturing capabilities.