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本文研究了一种以水为溶剂的Ba0．5Sr0.5TiO3（BST）液体源溶液，并用Sol－Gel技术制备出BST薄膜，实验中，对水基BST液体源浓缩凝胶进行了DTA／TGA分析，XRD谱分析显示，BST膜呈现纯钙钛矿相结构．从SEM电镜照片可以看到，BST薄膜厚度均匀一致，650℃热处理20min后，晶粒大小为200nm左右．性能测试结果表明，介电性能与膜厚有关，厚度为1250的BST薄膜具有较优良的介电性能，当测试频率为1kHz时，介电常数为330，介电损耗为0.043左右．
In this paper, we studied a Ba0.5Sr0.5TiO3 (BST) liquid source solution with water as solvent and BST thin films prepared by Sol-Gel technique. In the experiment, DTA / TGA analysis of water-based BST liquid-source concentrated gel XRD analysis shows that the BST film has a pure perovskite phase structure. SEM SEM images can be seen, BST film thickness uniform, 650 ℃ heat treatment 20min, the grain size of about 200nm. The results of the performance test show that the dielectric properties are related to the film thickness. The BST film with a thickness of 1250 has better dielectric properties. When the test frequency is 1kHz, the dielectric constant is 330 and the dielectric loss is about 0.043.