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本文介绍一种新型的集成多晶硅悬臂梁振动传感器的设计。其机械元件是一个带端点质量块的铝-多晶硅复合悬臂梁,以用来敏感外界的机械振动,通过测量MOSFET的漏极输出电流的变化来测量振动的加速度,器件的这种结构避免了硅悬臂梁的各向异性腐蚀的复杂性
This article describes a new type of integrated polysilicon cantilever vibration sensor design. The mechanical element is an aluminum-polycrystalline composite cantilever beam with an end point mass to sense external mechanical vibrations. Vibration acceleration is measured by measuring the change in drain current of the MOSFET. This structure of the device avoids silicon The complexity of anisotropic corrosion of cantilevers