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用磁控溅射方法制备了ＴｉＯ２ 纳米薄膜和ＴｉＯ２／ＺｎＦｅ２Ｏ４ 纳米复合薄膜，研究了不同温度热处理和不同含量纳米铁酸锌对纳米ＴｉＯ２ 薄膜光学性能的影响。研究结果表明：用磁控溅射方法制备的纳米薄膜的厚度和晶粒尺寸均匀，并且随着热处理温度的升高而增大，掺杂纳米ＺｎＦｅ２ Ｏ４后ＴｉＯ２ 纳米薄膜的晶粒尺寸略有减小。ＸＲＤ 研究发现ＴｉＯ２／ＺｎＦｅ２Ｏ４ 纳米复合薄膜由非晶相向锐态矿相转变的温度高于纳米ＴｉＯ２ 薄膜。ＴｉＯ２ 纳米薄膜和ＴｉＯ２／ＺｎＦｅ２ Ｏ４ 纳米复合薄膜的光吸收边都随着晶粒尺寸的降低而发生蓝移，在相同热处理条件下，掺杂纳米ＺｎＦｅ２ Ｏ４ 后，纳米ＴｉＯ２薄膜的光吸收边发生了较大范围的红移，红移量随着掺杂量的增加而增大。通过热处理和掺杂纳米ＺｎＦｅ２Ｏ４ 可以实现对纳米ＴｉＯ２ 薄膜光吸收边大范围的调制。
The TiO2 nanostructured films and TiO2 / ZnFe2O4 nanocomposite films were prepared by magnetron sputtering. The effects of heat treatment at different temperatures and different contents of zinc ferrite on the optical properties of nanocrystalline TiO2 films were investigated. The results show that the thickness and grain size of the nano-films prepared by magnetron sputtering method are uniform and increase with the increase of the heat treatment temperature. The nano-sized ZnFe 2 O 4 films have a slightly smaller grain size small. XRD study found that the transition temperature of TiO2 / ZnFe2O4 nanocomposite films from amorphous phase to sharp phase is higher than that of nano-TiO2 film. The light absorption edges of both TiO2nanofilms and TiO2 / ZnFe2O4nanocomposite films are blue-shifted with the decrease of the grain size. Under the same heat treatment conditions, the absorption edge of the nanocrystalline TiO2 films occurs after the nanometer ZnFe2O4 is doped A larger range of redshift and redshift increase with the doping amount. A large range of modulation of the light absorption of the nano-TiO2 film can be achieved by heat treatment and doping of the nano-ZnFe2O4.