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等离子体被称为物质“第四态”,对于采用直流、高频、射线、光及金属热电子流等产生等离子体的方法,大家都比较熟悉。采用微波放电产生等离子体,最先用于雷达的天线开关管,但用于科学研究及工业生产中,在我国只是近几年来才开始尝试的。由于它与其他方法相比具有许多独特的优点,所以越来越被人们所重视。微波等离子体源的特点由于微波能穿透介质,放电系统无需内电极即可维持气体放电,因而避免了诸如电极的
Plasma is referred to as the “fourth state” of matter, and is familiar to all of you for generating plasma using direct current, high frequency, radiation, light and metal hot electron flow. Microwave discharge plasma, the first for radar antenna switch, but for scientific research and industrial production, in our country only in recent years began to try. As it has many unique advantages over other methods, it is getting more and more attention. Characteristics of a microwave plasma source Because microwave energy penetrates the medium, the discharge system maintains the gas discharge without the need for an internal electrode, thereby avoiding problems such as electrode