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手工操作限制了MEMS传感器的批量生产.为了降低生产成本,同时提高传感器的产品质量,研制了柔性自动阳极键合系统.该系统包括一系列功能模块,包括精密定位系统、显微视觉子系统、柔性微操作手、加热系统、键合夹具、物流系统以及其它的附属系统.通过模块重构和调整,可实现不同尺寸规格传感器的键合.基于显微视觉以及微装配系统的特性,提出了基于小波变换的自动调焦清晰度评价函数,同时提出了基于改进史密斯预估器的用于克服视觉延迟的伺服控制结构.集成一维微力传感器的微操作手可实现高精度和无损操作.为了实现自动化操作,开发了包括任务规划和实时控制功能的控制系统.试验验证了该系统的自动键合功能.
Manual operation limits the mass production of MEMS sensors.In order to reduce the production cost and improve the sensor’s product quality, a flexible automatic anode bonding system is developed.The system includes a series of function modules, including precision positioning system, microscopic vision subsystem, Flexible micromanipulator, heating system, bonding fixture, logistics system and other accessory systems.With module reconfiguration and adjustment, the bonding of different size sensors can be realized.Based on the characteristics of micro-vision and micro-assembly system Based on the wavelet transform auto-focus definition evaluation function, a servo control structure based on improved Smith predictor to overcome the visual delay is put forward.Micromanipulators with integrated one-dimensional micro-force sensor can achieve high precision and non-destructive operation. To realize the automation operation, a control system including task planning and real-time control function was developed.The experiment proves the automatic bonding function of this system.