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提出一种广泛使用的CO2激光法,以直接读写烧蚀的方式,进行快速的聚甲基丙烯酸甲酯(PMMA)基材的微流控分析芯片的制造.利用此方法所制造的微流道,将以扫描电子显微镜(SEM)、原子力显微镜(AFM)及表面轮廓仪进行各项表面性质的分析.本文所发展的CO2激光烧蚀法,提供了一个可广泛使用及具有经济效应的PMMA基材的微流控分析芯片的制造方法.在此激光制程法中,微流控分析芯片的制造图案可由商业的套装软件绘制而成,再传输至激光系统中进行烧蚀微管道,结果显示利用离焦法的激光制程技术,在没有退火处理的情况下,就可以获得表面相当平滑的微流道,表面粗糙度小于4nm.
A widely used CO2 laser method is proposed for the microfluidic analysis of a fast polymethylmethacrylate (PMMA) substrate by direct read and write ablation methods. The microfluidic chip produced by this method Will be analyzed by scanning electron microscopy (SEM), atomic force microscope (AFM) and surface profiler for various surface properties.The CO2 laser ablation method developed in this paper provides a widely available and economical PMMA Substrate microfluidic analysis of the manufacturing method of the chip in this laser processing method, microfluidic analysis of the chip manufacturing pattern drawn by the commercial package software, and then transmitted to the laser system for micro-duct erosion, the results show Using the laser process technology of the defocus method, the micro-channel with a rather smooth surface can be obtained without annealing, and the surface roughness is less than 4 nm.