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采用溶胶-凝胶法制作波导环形谐振腔,讨论了环形谐振腔器件的传输特性。测量了在不同物质、不同体积分数的挥发性有机化合物(VOC)蒸气气氛下器件的传输光谱的敏感性。结果表明,谐振波长随甲醇、乙醇、丙醇等醇类化合物,以及丙酮、甲醛等蒸气体积分数的上升而向长波方向移动,具有高的灵敏度,且两者基本呈线性关系。其中,对丙醇最敏感,灵敏度达到1.403 pm/10-6。对甲烷和二甲苯也有微弱反应,但是其灵敏度很低。也测量了水蒸气对传输谱特性的影响。观察到传输谱衬比度对不同挥发性有机化合物物质蒸气的不同敏感特性。对传感机制进行了讨论。
The waveguide ring resonator was fabricated by sol-gel method and the transmission characteristics of the ring resonator was discussed. The sensitivities of the devices’ transmission spectra were measured in different volatile organic compound (VOC) vapor atmospheres with different volume fractions. The results show that the resonance wavelength moves in the direction of longwave with the rise of vapor volume fraction of methanol, ethanol, propanol and other steam, and has a high sensitivity and a linear relationship. Among them, the most sensitive to propanol, the sensitivity reached 1.403 pm / 10-6. There is also a weak response to methane and xylene, but its sensitivity is low. The effect of water vapor on the transmission spectrum was also measured. Different sensitivities of the spectral contrast of the transmitted spectrum to the vapors of different volatile organic compounds were observed. The sensing mechanism is discussed.