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本文介绍一种新型集成压力传感器.它是利用集成电路技术和微机械加工技术相结合,将半导体力敏电阻和双稳态触发器电路结合在一起,制作触发器型集成压力传感器.文章对该类传感器的工作原理,电路结构进行了理论分析,并对实验结果进行了讨论.重点分析了噪声对传感器特性的影响,在测试电路中加入调控三角波电压,可以改善传感器的特性.
This article describes a new integrated pressure sensor. It is a combination of integrated circuit technology and micromachining technology, the combination of semiconductor resistance and bistable flip-flop circuit, the production of trigger-type integrated pressure sensor. The article analyzes the working principle and the circuit structure of this kind of sensor theoretically, and discusses the experimental results. Focus on the analysis of the noise on the sensor characteristics of the test circuit in the regulation of triangular wave voltage can improve the characteristics of the sensor.