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调修6J型干涉显微镜,其干涉条纹的寻找和对比度的调整是件很麻烦的工作。本文介绍的方法,经实践证明,过程简便而且能获得对比度令人满意的结果。一、仪器光路和元件相对位置仪器光路如图1。光由白炽灯,经聚光镜2和滤色片3会聚于孔径光栏4上,照亮视场光栏5,孔径光栏位于物镜6和测量物镜9(或参考物镜10)的组合前焦点上,视场光栏位于物镜6的前焦面上,光束经分光板7分为测量光束和参考光束,分别通过物镜9和10到达被测件11和参考镜12,然后返回在分光板上相遇。被测件和参考镜应分别置于物镜9和10的焦面
Tune 6J interference microscope, the search for the interference fringes and the contrast adjustment is a very troublesome task. The method described in this article has been proven by practice to be simple and gives satisfactory contrast results. First, the relative position of the optical path and components of the instrument Optical path shown in Figure 1. Light from the incandescent lamp converges on aperture diaphragm 4 via condenser 2 and color filter 3 to illuminate field diaphragm 5 which is located on the combined front focus of objective 6 and measurement objective 9 (or reference objective 10) , The field diaphragm is located on the front focal plane of the objective lens 6. The beam is divided into measuring beam and reference beam by the beam splitting plate 7 and reaches the DUT 11 and the reference mirror 12 respectively through the objective lenses 9 and 10 and then returns to meet on the beam splitting plate . The DUT and the reference mirror should be placed on the focal planes of the objectives 9 and 10, respectively