【摘 要】
：
The preparation of a-SiOCF films from Si(OC2H5)4, C4F8 and/or Ar using the plasma-enhanced chemical vapourdeposition method is reported. The chemical bonding s
【机 构】
：
Department of Electronic Engineering, Fudan University, Shanghai 200433, China“,”Taiwan Semiconducto
论文部分内容阅读
The preparation of a-SiOCF films from Si(OC2H5)4, C4F8 and/or Ar using the plasma-enhanced chemical vapourdeposition method is reported. The chemical bonding structures of the films are analysed by x-ray photoelectronspectroscopy (XPS). In the case of the films deposited from the mixture with and without Ar, the configurations ofF-Si-O-Si, Si-OH, Si-O-Si, C-CF and C-F are contained. However, there is also the C-C configuration in the filmprepared from the mixture with Ar. Moreover, it is found that the photoelectron peaks of Si 2p, O ls and F ls for thefilm deposited from the feeding gas with Ar show the same shift of about leV toward high binding energy in comparisonwith those for the film prepared from the feeding gas without Ar. No evidence reveals the presence of an Si-C bond inthe films.
其他文献
The properties of the ground state in the spin-2 transverse Ising model with the presence of a crystal field arestudied by using the effective-field theory with
Two optical set-ups to implement wavelet transform with a single lens have been proposed, in which the wavelet filter was placed in front of the imaging lens or
A universal theory of steady-state one-dimensional photorefractive spatial solitons is developed which applies to the steady-state one-dimensional photorefracti
We demonstrate a new kind of instability of the exteal cavity semiconductor laser. In some parameter regimes,the exteal cavity system will produce short and str
尽管广西钦州市、百色市田东县、南宁市横县等农村金融改革试点县进展顺利,但从总体上看,广西农村金融整体发展仍较为落后,六大难题制约农村金融改革进一步深化.
FtsH蛋白参与PSⅡ核心蛋白D1蛋白光氧化损伤的降解,是植物抵抗光抑制,修复PSⅡ正常功能的关键成分之一。本实验室前期从大豆科丰一号的15号染色体上克隆了GmftsH基因,本研究采用花粉管通道法和农杆菌介导子叶节转化法将GmftsH基因导入栽培大豆中,为培育转基因高光效大豆新品种提供基础,获得主要结果如下：1、采用花粉管通道法将光抑制相关基因GmftsH导入五个大豆栽培品种中,共转化7550朵花
A method that allows one to control chaotic and hyperchaotic systems by a random proportional pulse feedbackof system variables is proposed. This method is illu
We report on a new experimental result to generate dark hollow beams by using a geometric optical method.We propose two new methods to produce focused and local
A simple model has been developed to describe the Zeeman pattes of far-infrared laser magnetic resonancespectra of the monobromomethyl radical CH2Br observed at
The Yb3+ laser emitting at a 1.03μm wavelength has been evoking strong interest recently due to its advantages of long fluorescence lifetime, broad absorption