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本文在对异质结光晶体管的光电流注入进行理论分析的基础上,采用选择性腐蚀工艺,制出了在蓝紫光波段灵敏的GaAs/Ga_(0.55)Al_(0.45)As异质结光晶体管,其光谱响应范围为小于4000A到8800A.峰值响应波长为5500A.4000A处的相对响应约为30％,其绝对响应度优于 70μA/μW.
Based on the theoretical analysis of photocurrent injection in heterojunction phototransistor, a selective etching process was used to fabricate a GaAs / Ga 0.55 Al 0.45 As heterojunction photoconductor With a spectral response range of less than 4000 A to 8800 A. The peak response wavelength is 5500 A. The relative response at 4000 A is about 30% and its absolute responsivity is better than 70 A / W.