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采用室温磁控溅射技术在镁合金(AZ91D)表面制备了CNx/SiC/Ti(氮化碳/碳化硅/钛)多层膜(SiC、Ti为中间层),研究了CNx薄膜的纳米压痕行为和摩擦磨损性能.结果表明:CNx薄膜具有低的纳米硬度(6.67GPa)、低的弹性模量(54.68GPa)和高的硬度与弹性模量比值(0.122);在以氮化硅球为对摩副的室温干摩擦条件下摩擦系数约为0.162,磨损率在10-6mm3/(m.N)级,薄膜经长时间(3.5h)磨损后未出现裂纹和剥落.分析表明,摩擦化学和硬度与弹性模量比值对摩擦系数和磨损率有重要影响.
CNx / SiC / Ti multilayers (SiC, Ti as interlayer) were prepared on the surface of magnesium alloy (AZ91D) by magnetron sputtering at room temperature. The effects of nano pressure The results show that CNx thin films have low nanohardness (6.67GPa), low elastic modulus (54.68GPa) and high hardness-elastic modulus ratio (0.122) The friction coefficient is about 0.162 and the wear rate is 10-6mm3 / (mN) at room temperature under dry friction conditions, and no cracks and flaking occurs after the film has been worn for a long time (3.5h). The analysis shows that the frictional and The ratio of hardness to modulus of elasticity has an important influence on the coefficient of friction and on the rate of wear.