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High quality epitaxial YBa2Cu3O7-δ (YBCO) superconducting films were fabricated on (00l) LaAlO3 substrates using the direct-current sputtering method. The attainment of an unusually high film thickness (up to 2.0 μm) without mi-crocracking was attributed in part to the presence of pores correlated with yttrium-rich composition in the films. The influ-ence of the film thickness on the microstructure was investigated by X-ray diffraction conventional scan (θ-2θ,ω-scan,pole figure) and high-resolution reciprocal space mapping. The films were c-axis oriented with no a-axis-oriented grains up to the thickness of 2 μm. The surface morphology and the critical current density (Jc) strongly depended on the film thickness. Furthermore,the reasons for these thickness dependences were elucidated in detail.
High-quality epitaxial YBa2Cu3O7-δ (YBCO) superconducting films were fabricated on (001) LaAlO3 substrates using the direct-current sputtering method. The attainment of an unusually high film thickness (up to 2.0 μm) without mi-crocracking was attributed in part to the presence of pores correlated with yttrium-rich composition in the films. The influ-ence of the film thickness on the microstructure was investigated by X-ray diffraction conventional scan (θ-2θ, ω-scan, pole figure) and high-resolution reciprocal space mapping. The films were c-axis oriented with no a-axis-oriented grains up to the thickness of 2 μm. The surface morphology and the critical current density (Jc) strongly depended on the film thickness. these thickness dependences were elucidated in detail.