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分析研究复合碳膜的制备及场发射效果。在陶瓷衬底上磁控溅射一层金属钛,对金属钛层进行仔细研磨,放入微波等离子体化学气相沉积腔中,在镀钛陶瓷衬底上制备出碳膜。利用扫描电镜、x射线衍射、拉曼光谱分析复合碳膜的微观结构和微观表面形态,表明此碳膜是含有碳纳米管、非晶碳和球状微米金刚石颗粒的复合碳膜。用二极管型结构测试了复合碳膜的场致发射电子的性能。首次发光的电场为0.75V/μm,稳定发光2.56V/μm的电场下,复合碳膜阴极发射电流密度为7.25mA/cm2。并对其复合碳膜制备成因及发射机理进行了研究。
Analysis and study of the preparation of composite carbon film and field emission effect. A layer of titanium metal is magnetron sputtered on a ceramic substrate, and the titanium metal layer is carefully ground into a microwave plasma chemical vapor deposition chamber to prepare a carbon film on the titanium-coated ceramic substrate. Scanning electron microscopy, X-ray diffraction and Raman spectroscopy were used to analyze the microstructure and surface morphology of the composite carbon film. The results show that the carbon film is a composite carbon film containing carbon nanotubes, amorphous carbon and spherical microdispersed diamond particles. The performance of the field emission electrons of the composite carbon film was tested with a diode-type structure. Under the electric field of 0.75V / μm for first luminescence and 2.56V / μm for luminescence, the cathode current density of composite carbon film is 7.25mA / cm2. The formation mechanism and emission mechanism of the composite carbon film were also studied.