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1998年,液晶显示器(LCD)面板价格开始下跌,随之其产品市场却相应得到进一步扩展。市场的发展使得液晶显示器的原有生产线也要进行改造,并针对基板尺寸、制造过程,搬运装置及生产方式进行全面的评估,以下简要介绍其清洗设备的发展。第一代薄膜LCD用清洗设备出现在1990～1991年期间,当时的基板尺寸仅300mm×400mm。到1993～1994年期间,基板尺寸扩大到370mm×470mm及400mm×500mm两种规格。1995～1996年期间出现了550mm×650mm的规格。进入21世纪时,所谓第四代LCD生产线生产的基板尺寸为700mm×900mm、800mm×950mm以及960mm×1000mm等规
In 1998, the prices of liquid crystal display (LCD) panels began to fall, while their product markets were correspondingly expanded accordingly. The development of the market makes the original production line of liquid crystal display must also be transformed, and a comprehensive assessment of the substrate size, manufacturing process, handling equipment and production methods, the following briefly describes the development of its cleaning equipment. The first generation of thin-film LCD cleaning equipment appeared between 1990 and 1991, when the substrate size is only 300mm × 400mm. From 1993 to 1994, the substrate size expanded to 370mm × 470mm and 400mm × 500mm two kinds of specifications. From 1995 to 1996 appeared 550mm × 650mm specifications. Into the 21st century, the so-called fourth-generation LCD production line substrate size 700mm × 900mm, 800mm × 950mm and 960mm × 1000mm