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本文利用准谐频设计方法，在常规光刻工艺水平上，成功地实现了ＧＨｚ级声表面波（ＳＡＷ）器件。准谐频叉指换能器（ＱＨＩＤＴ）的优点为：其指条宽与指间隙可以比一般的单指换能器宽，克服了单指换能器内指间的多次反射，并且又较好地解决了普通谐频叉指换能器基频抑制不好的缺点。本文给出了制作在ＳＴ石英基片上，工作频率１１２８ＭＨｚ的声表面波滤波器的实验结果。
In this paper, we use the method of quasi-harmonic design to successfully achieve the GHz-class surface acoustic wave (SAW) devices at the level of conventional lithography. The advantages of quasi-harmonic interdigital transducers (QHIDTs) are that their finger widths and finger gaps can be wider than those of conventional single-finger transducers, overcome the multiple reflections of the interdigital fingers of single-finger transducers, and A better solution to the common harmonic interdigital transducer fundamental frequency suppression is not good shortcomings. This paper presents the experimental results of a SAW filter fabricated on an ST quartz substrate with an operating frequency of 1128 MHz.