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本文采用X射线衍射仪(XRD)、高分辨扫描电镜(HRSEM)、显微维氏硬度计、声发射划痕仪,研究了以化学气相沉积(CVD)法制备的TiCN和TiCNO涂层。通过对比涂层的相结构、组织形貌、硬度及结合强度,分析氧的掺入对TiCN涂层显微结构和力学性能,特别是结合强度的影响。结果表明:CVD制备的TiC0.81N0.48涂层截面呈柱状结构,硬度和结合强度分别为2 063 HV及127 N。掺入氧后的TiC0.61N0.44O0.15和TiC0.52N0.25O0.1涂层没有出现新的物相,为面心立方结构的TiCNO固溶体,具有(111)织构;氧的掺入细化了晶粒,使涂层转变为致密结构;其硬度分别提高至2 207 HV和2 753 HV,但与基体结合强度分别下降至88 N和63 N。
In this paper, TiCN and TiCNO coatings prepared by chemical vapor deposition (CVD) were investigated by X-ray diffraction (XRD), high resolution scanning electron microscopy (HRSEM), micro Vickers hardness tester and acoustic emission scratch tester. By comparing the phase structure, morphology, hardness and bonding strength of the coating, the effects of oxygen incorporation on the microstructure and mechanical properties of TiCN coating, especially the bonding strength were analyzed. The results show that the cross section of TiC0.81N0.48 coating prepared by CVD has a columnar structure with hardness and bonding strength of 2,063 HV and 127 N, respectively. TiC0.61N0.44O0.15 and TiC0.52N0.25O0.1 coatings doped with oxygen showed no new phase, which was a (111) textured TiCNO solid solution with face-centered cubic structure. The incorporation of oxygen into fine The grains were transformed to form a dense structure. The hardness increased to 2 207 HV and 2 753 HV, respectively, but the bonding strength decreased to 88 N and 63 N, respectively.