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本文介绍五种类型的亚微米悬浮粒子测量仪器的工作原理:(1)光学粒子计数器(OPC),其中包括激光光谱仪;(2)气动粒子分选机;(3)粒子电迁移率分析仪;(4)扩散电解槽;(5)冷凝核子计数器。光学粒子计数器主要用来测量0.5～5.0μm尺寸的粒子,是半导体厂内净化室最常用的粒子监测设备,气动离子分选机测量的粒子的尺寸与前一种仪器相同,但它是迄今尚未广泛使用的一种较新的设备,能直接测量与净化室类似的连续流动系统内的气动粒子,对直径最大的粒子最适用。电迁移率分析仪和扩散电解槽均为尺寸分选设备,当在冷凝核子计数器上游使用时,它们能够测量0.02～0.2范围内的悬浮粒子的分布状况。不过,对静止状态下净化室内的典型粒子浓度的统计性计数测量不够精确。
This article describes five types of submicron suspended particle measuring instrument works: (1) optical particle counter (OPC), including laser spectrometer; (2) pneumatic particle sorting machine; (3) particle mobility analyzer; (4) Diffusion cell; (5) Condensation nuclear counter. Optical particle counter is mainly used to measure particles of 0.5 ~ 5.0μm size, is the most commonly used particle monitoring equipment in the semiconductor factory clean room, the size of the particle size of the pneumatic ion sorter measuring the same instrument, but it is by now not yet A relatively new and widely used device that directly measures aerodynamic particles in a continuous flow system similar to a clean room, is best suited for particles with the largest diameters. Both the electromigration analyzer and the diffusion cell are size sorting devices that measure the distribution of suspended particles in the 0.02-0.2 range when used upstream of the condensed nucleus counter. However, the statistical count measurement of the typical particle concentration in a decontamination chamber at rest is not accurate enough.