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  5. Influence of background pressure on the microstructure and optical properties of Mo/Si multilayers f

Influence of background pressure on the microstructure and optical properties of Mo/Si multilayers f

来源 :中国科学：物理学、力学、天文学英文版 | 被引量 : 0次 | 上传用户：ajing819
【摘 要】
：
Thermo-optic tunable thin-film filter based on Fabry-Perot(F-P) cavity structure is a very attractive alternative integrated optical device.In this simulation-b
【作 者】
：
LV Peng ZHANG ZaiQiang GUAN Ji 
【机 构】
：
SchoolofMaterialsScience&,Engineering,FacultyofScience,StateKeyLaboratoryofAppliedOptics
【出 处】
：
中国科学：物理学、力学、天文学英文版
【发表日期】
：
2013年9期
【关键词】
：
压力下降 磁控溅射法 周期性结构 Mo Si 光学性能 溅射制备 掠入射X射线衍射 background pressure effects optical pr 
【基金项目】
：
supported by the National Natural Sciences Foundation of China （Grant No.50671042）, the Open Project of State Key Laboratory of Applied Optics （Changchun Institute of Optics,Fine Mechanics and Physics
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Thermo-optic tunable thin-film filter based on Fabry-Perot(F-P) cavity structure is a very attractive alternative integrated optical device.In this simulation-based paper,the key performance of typical thermo-optic tunable F-P filter is discussed by analy
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