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本文报道了金属有机源分子束外廷设备的设计方案和技术特点。该设备最大样品尺寸为3英寸,3室结构,空气闭锁换样,6条气路,外廷生长工艺过程计算机控制
This paper reports the design scheme and technical features of metal organic source molecular beam epitaxy equipment. The largest sample size of the device is 3 inches, 3-chamber structure, air lock-off sample change, 6 gas lines, the growth process outside the court computer control