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世界上第一个依靠简单开关操作可以发射电子或离子束的混合束源,由日日本日立公司和Toyohashi 技术大学联合研制成功.这项由日本教育部资助的研究是采用类似电子束方法,由离子束来制造VLSI 器件,达到了比通常电子束方法更高的分辨率.装置的结构是一根针尖直径0.1～0.2μm 的钨丝,固定在充满液态金属镓的坩埚中作为离子源.坩埚的四周外加一电场,利用表面张力和库仑引力的平衡使钨针的顶端带起一小部分液态金属构成一个锥体.当正、负电压分别加到引出电极时,在锥体的钨针顶端可以产生离子或电子放电.因此,利用开关可很方便地实现电子或离子的发射.由于锥体的顶端直径仅5～10(?),比通常的电子束源钨丝针尖直径1000(?)小很多,因而可以产生更细的束径,与电
The world’s first hybrid beam source that can emit either electron or ion beams by simple switching operations was successfully developed by Japan’s Hitachi and Toyohashi Technical University, a study funded by the Japanese Ministry of Education using a similar electron-beam method consisting of Ion beam to produce a VLSI device with a higher resolution than the conventional electron beam method.The device was constructed of a tungsten wire with a tip diameter of 0.1 to 0.2 μm and fixed in a crucible filled with liquid metal gallium as an ion source The crucible Of the external plus an electric field, the use of surface tension and the balance of Coulomb attraction so that the tip of the tungsten needle with a small portion of the liquid metal to form a cone when the positive and negative voltage were added to the extraction electrode, the top of the tungsten needle cone Can generate ion or electron discharge, so the switch can be very convenient to achieve the emission of electrons or ions.As the tip of the cone diameter of only 5 ~ 10 (?) Than the usual electron beam source tungsten tip 1000 (?) Much smaller, and thus can produce finer tracts, with electricity