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基于热传导方程建立了ZnO薄膜的准分子激光辐照理论模型,模拟分析了KrF准分子激光辐照ZnO薄膜的热效应。计算了薄膜的温度场分布和热流分布,讨论了激光作用过程中的温度随时间的变化关系,分析了激光能量密度对薄膜温度场的影响。模拟结果表明,ZnO薄膜的准分子激光退火具有急热骤冷特性,ZnO薄膜表面温度与激光能量密度呈线性增长关系,表面热熔融阈值为261mJ/cm2。
The theoretical model of excimer laser irradiation of ZnO thin film was established based on heat conduction equation. The thermal effect of KrF excimer laser irradiation on ZnO thin film was simulated. The temperature field distribution and heat flux distribution of the film were calculated. The relationship between the temperature and the laser beam temperature was discussed. The influence of the laser energy density on the temperature field was analyzed. The simulation results show that the excimer laser annealing of the ZnO thin film has the characteristics of rapid thermal quenching. The surface temperature of the ZnO thin film increases linearly with the laser energy density, and the surface thermal melting threshold is 261 mJ / cm2.