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利用p偏振光在镀膜平板玻璃前后表面反射光强比γ与膜层光学参数之间的密切关系,给出了玻璃表面层的光学参数分布.对典型的薄膜系统—单面镀膜与双面镀膜两种情况,理论分析了玻璃表面层对薄膜光学参数测量的影响.实验上对PMTES和SnO2薄膜参数进行了测量,仅当计及玻璃表面层作用时,反射光强比γ的角度调制曲线才与理论拟合结果相吻合
The optical parameter distribution of the glass surface layer is given by using the close relationship between the light intensity ratio γ of the surface before and after the p-polarized light passes through the coated flat glass and the optical parameter of the film. The influence of the glass surface layer on the measurement of the optical parameters of the film is theoretically analyzed for the typical thin film system - single-side coating and double-side coating. The parameters of PMTES and SnO2 films were experimentally measured. Only when the effect of the glass surface layer was taken into consideration, the angle modulation curve of the reflection light intensity ratio γ was consistent with the theoretical fitting result