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超精密机床是实现超精密加工的必要条件,它的研制成功对微电子、国防等尖端技术具有十分重要的意义。本文研究了超精密机床的关键部分——激光在线测量系统,并对其快速数据采集系统的硬件设计进行了深入的探讨,为超精密机床的研制奠定了基础。
Ultra-precision machine tools are necessary for ultra-precision machining. Its successful development is of great significance to cutting-edge technologies such as microelectronics and defense. In this paper, the key part of the ultra-precision machine tool-laser on-line measurement system is researched. The hardware design of its fast data acquisition system is discussed in depth, which lays the foundation for the development of ultra-precision machine tools.