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本文介绍用一般真空镀膜工艺,通过控制蒸镀时的气氛和压力,研制成功一种新型光谱选择性吸收涂层。该涂层具有α_s>0.87和ε_h<0.10的光学性能。透射电镜、扫描电镜、X-线衍射和俄歇电子能谱分析结果表明:黑铝涂层是由细晶铝和无定形氧化铝构成的金属陶瓷所组成,颗粒尺寸约为100～200(?)。涂层俄歇电子能谱分析结果表明:由于 AES 图中同时存在68;1396eV(Al)和51;1378eV Al_(Al_2O_3)两组特征峰,表明黑铝涂层由 Al 和Al_2O_3金属陶瓷所组成。根据原子百分含量计算的重量百分组成为:Al—0.43;Al_2O_3—0.57。由于黑铝涂层具有工艺简便、原料成本低、可加涂在塑料薄膜上和可望大面积连续蒸镀工艺等特点,因此是一种很有发展前景的廉价光谱选择性吸收涂层。
This article describes the general vacuum coating process, by controlling the atmosphere and pressure during vapor deposition, the successful development of a new type of spectrally selective absorption coating. The coating has optical properties of α_s> 0.87 and ε_h <0.10. The results of TEM, SEM, X-ray diffraction and Auger electron spectroscopy show that the black aluminum coating is composed of cermets consisting of fine-grained aluminum and amorphous alumina with a particle size of about 100-200 (? ). Auger electron spectroscopy analysis of the coating showed that the black aluminum coating consisted of Al and Al_2O_3 cermets due to the simultaneous presence of two characteristic peaks of 68; 1396eV (Al) and 51; 1378eV Al_2O_3 in the AES image. The weight percentages calculated on the basis of atomic percentages are: Al-0.43; Al 2 O 3 -0.57. As a result of its advantages of simple process, low cost of raw materials, application of coating on plastic film and large-area continuous evaporation process, the black aluminum coating is promising and cost-effective as a spectrally selective absorbing coating.