YBa_2Cu_3O_(7-x)超导薄膜的离子束改性

• 作 者: 李贻杰 任琮欣 陈国梁 陈建民 邹世昌
• 机 构: 中国科学院上海冶金研究所离子束开放实验室,中国科学院上海冶金研究所离子束开放实验室,中国科学院上海冶金研究所离子束开放实验室,中国科学院上海冶金研究所离子束开放实验室,中国科学院上海冶金研究所离子束开
• 出 处: 半导体学报
• 发表日期: 1991年10期
• 关键词: 超导薄膜 YBa_2Cu_3O 临界电流密度 零电阻 薄膜质量 注入剂量 子注 转变温度 约瑟夫森器件 离子注入

本文主要研究了离子注入对YBa_7Cu_3O_(7-x)薄膜超导性质的影响.测量了Ar离子注入剂量与超导转变温度T_c之间的关系.实验结果表明,高质量的YBa_2Cu_3O_(7-x) 超导薄膜具有一定的抗辐照性.随着注入剂量的增加,临界电流密度I_c下降很快,但零电阻转变温度T_c却下降较慢.分析和讨论了离子注入对YBa_2Cu_3O_(7-x)中一维Cu-O链和二维Cu-O面的影响,探讨了离子束改性手段在YBa_2Cu_3O_(7-x)超导薄膜图形加工中应用的可能性.

The effect of ion implantation on the superconductivity of YBa_7Cu_3O_ (7-x) thin films was investigated in this paper.The relationship between the dose of Ar ion implantation and the superconducting transition temperature T_c was measured.The experimental results show that the high quality YBa_2Cu_3O_ (7-x) Superconducting thin films have a certain anti-radiation properties.With the injection dose increases, the critical current density I_c decreased rapidly, but the zero-resistance transition temperature T_c decreased slowly.Analysed and discussed the ion implantation of YBa_2Cu_3O_ (7-x) Dimensional Cu-O chains and two-dimensional Cu-O planes, the possibility of application of ion beam modification in the patterning of YBa_2Cu_3O_ (7-x) superconducting thin films was discussed.