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对光刻技术而言,除了某些特殊情况(例如电子束曝光等)以外,一般都需要印有原图的掩模。作掩膜的材料主要是用银盐感光材料(照象干版或软片),随着光刻技术的发展,明胶膜的耐久性方面的缺点就成了银盐感光材料使用中的一个问题。作为克服这个问题的一个办法,现在有一种采用金属薄膜图象的强烈趋势。在透明衬底上(玻璃板)牢固作上的金属薄膜图象具有胜过干版数十倍的耐久性,在使工业光刻工艺稳定起来的同时,它还有分辨率高和图形的清晰度好等优点。在玻璃衬底上形成的金属薄膜图形一般用光刻来作,在衬底,薄膜材料,制作薄膜方法以及光刻工艺等方面,由于工艺
For photolithography, masks are usually printed with the exception of some special cases (such as electron beam exposure). The mask material is mainly silver salt photosensitive material (photo dry plate or film), with the development of lithography, the shortcomings of gelatin film durability has become a silver salt photosensitive material used in a problem. As a solution to this problem, there is now a strong tendency to adopt metallic film images. The solid metal film image on transparent substrates (glass plates) provides decades of durability over dryers, stabilizing the industrial lithography process, and offers high resolution and sharp graphics Degree is good and so on. The metal thin film pattern formed on the glass substrate is generally made by photolithography. In terms of the substrate, the thin film material, the thin film manufacturing method, the photolithography process and the like,