论文部分内容阅读
在确定性光学抛光过程中,当加工到工件边缘时由于工艺条件发生变化会产生边缘效应,导致加工效率降低和面形误差增大.针对这种情况,提出了一种可修正边缘现象的球形工具抛光技术,其去除函数稳定性较好,形状趋于高斯分布且束径也较小,对修正边缘现象以及局部面形误差具有较好的效果.同时规划了其抛光路径,采用一种伪ρ-θ光栅扫描运动方式的加工路径,简化了球形抛光工具的结构,并且由于使加工纹路有了变化,可使加工后的表面纹理呈现无序性和均匀性特征,相应可提高加工后工件的表面质量.最后通过对一块微晶球面镜的加工(面形误差峰谷值PV由加工前1.607λ(λ=632.8 nm)收敛到加工后0.365λ,均方根值RMS由0.195λ收敛到0.024λ),验证了球形抛光工具具有修正边缘翘边现象的能力.
In the process of deterministic optical polishing, when machining to the edge of the workpiece, the edge effect will occur due to the change of the process conditions, resulting in the decrease of the machining efficiency and the increase of the surface shape error. In view of this situation, a spherical The tool polishing technique has a good removal function, a Gaussian distribution and a small beam diameter, and has good effects on the correction of edge phenomena and local surface shape errors. At the same time, the polishing path is planned and a pseudo ρ-θ raster scan mode of movement path, simplifying the structure of the spherical polishing tool, and due to the processing of the lines have changed, the processed surface texture disorder and uniformity of presentation characteristics, which can increase the workpiece after processing Finally, the surface roughness of a piece of microcrystalline spherical mirror (the shape error peak-to-valley PV converges to 0.365λ after machining from 1.607λ (λ = 632.8 nm) before machining), and the root mean square RMS converges from 0.195λ to 0.024 λ), which verifies the ability of the spherical polishing tool to correct the edge warping phenomenon.