Holographic fabricated continuous wave operation of distributed feedback quantum cascade lasers atλ≈

• 作 者: 张锦川 王利军 张伟 刘万峰 刘俊岐 刘峰奇 李路 王占国
• 机 构: Key Laboratory of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sci
• 出 处: 半导体学报
• 发表日期: 2011年04期
• 关键词: cascade tuning fabrication lithography grating reflectivity suppression facet ho

The fabrication and characterization of distributed feedback(DFB) quantum cascade lasers emitting atλ≈8.5μm are reported.The first-order DFB grating structure was defined using the holographic lithography technique.Reliable dynamic single-mode emission with a side-mode suppression ratio of 20 dB and a tuning coefficient of-0.277 cm~(-1)/K from 93 to 210 K is obtained in continuous wave mode by using high-reflectivity coating on the rear facet.The output power is over 100 mW at a temperature of 80 K.

The fabrication and characterization of distributed feedback (DFB) quantum cascade lasers emitting at λ≈8.5 μm are reported. First DFB grating structure was defined using the holographic lithography technique. Reliable dynamic single-mode emission with a side-mode suppression ratio of 20 dB and a tuning coefficient of -0.277 cm -1 / K from 93 to 210 K was obtained in continuous wave mode by using high-reflectivity coating on the rear facet. The output power is over 100 mW at a temperature of 80 K.