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在工模具表面沉积氮化钛、碳化钛等涂层可以提高其硬度和耐磨性,从而可显著提高其寿命。获得TiC等化合物涂层的方法过去多采用固体法、液体法和化学气相沉积法。这些方法多存在一定的问题:涂覆工艺多必须在较高温度下(1000℃左右)进行;沉积速率低;有公害等。近几年在国外出现了获得TiC等化合物层的新工艺——反应性离子沉积法。这是一项新技术,化合物涂层是在气体放电等离子区内反应生成的。这是继离子氮化、离子
In the mold surface deposition of titanium nitride, titanium carbide and other coatings can improve its hardness and wear resistance, which can significantly improve their life. In the past, many methods such as solid-state method, liquid method and chemical vapor deposition were used to obtain the coating of TiC and other compounds. Many of these methods have some problems: the coating process must be more at higher temperatures (about 1000 ℃); deposition rate is low; pollution and so on. In recent years, a new technology for obtaining TiC compound layer has appeared in foreign countries - reactive ion deposition. This is a new technology, the compound coating is generated in the gas discharge plasma reaction zone. This is followed by ion nitriding, ions