微纳集成电路和新型混合集成技术

• 作 者: 曾晓洋 黎明 李志宏 陈兢 杨玉超 黄如
• 机 构: 复旦大学微电子学院,北京大学信息科学技术学院,
• 出 处: 中国科学:信息科学
• 发表日期: 2016年08期
• 关键词: 集成 集成电路 低功耗 微电子器件 系统芯片 混合集成 摩尔定律 转接板 单片集成电路 器件

随着摩尔定律的不断推进,集成电路产业迎来了巨大发展机遇的同时,也面临着前所未有的发展瓶颈和技术挑战.论文围绕创新的微纳集成电路和新型混合集成技术领域的基础理论和关键技术问题,聚焦在新型低功耗器件及电路理论,纳米尺度单片集成电路技术、微纳传感和异质集成融合技术等方向,开展了比较广泛和深入的国内外研究现状与发展趋势综述,旨在为人们提供一个相对全面的“后摩尔”时代集成电路创新理论与技术发展脉络图,也尝试为新型应用驱动的集成电路技术与产品开发描绘出新的路线图.

With the continuous promotion of Moore’s Law, the IC industry has ushered in tremendous development opportunities, but also faces an unprecedented bottleneck in development and technical challenges.This paper focuses on the basic theory and key of innovative micro-nano integrated circuits and new hybrid integrated technologies Technical issues, focusing on the new low-power devices and circuit theory, nano-scale monolithic integrated circuit technology, micro-nano-sensing and heterogeneous integration of fusion technology, conducted a more extensive and in-depth review of the status quo and development trends at home and abroad Aiming at providing people with a relatively comprehensive development roadmap for the theory and technology of integrated circuit innovation in post-Moore era, and also trying to draw a new roadmap for new application-driven integrated circuit technology and product development.