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采用溶胶凝胶旋转涂布技术在石英基质上沉积三种不同厚度的TiO2薄膜,其厚度分别为174、195和229nm。沉积得到的薄膜是由尺寸为19~46nm的纳米微晶组成的,并具有较高的多孔结构。测定了薄膜的光学常数,得到了迄今为止报道的最低折射率1.66,并对所得结果进行了讨论。
Three different thicknesses of TiO2 films were deposited on a quartz substrate by sol-gel spin-coating, with thicknesses of 174, 195 and 229 nm, respectively. The deposited films are composed of nanocrystallites with a size of 19-46 nm, and have a higher porous structure. The optical constants of the films were measured and the lowest refractive index reported so far was 1.66, and the results obtained were discussed.