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用开管水平卧式液相外延系统在不同生长条件下生长了不同 x 值的MCT 液相外延薄膜。通过对外延生长工艺的控制,外延薄膜的表面形貌有较大改善,残留母液大为减少;外延薄膜的结构参数、电学参数和光学参数均有较大改善和提高。分析表明外延膜有较高的质量。短波材料和中波材料均已作出性能较高的器件。
MCT liquid-phase epitaxial films with different x-values were grown under open-drain horizontal liquid-phase epitaxy system under different growth conditions. By controlling the epitaxial growth process, the surface morphology of the epitaxial thin films is greatly improved, and the residual mother liquor is greatly reduced. The structural parameters, the electrical parameters and the optical parameters of the epitaxial thin films are greatly improved and improved. Analysis shows that the epitaxial film has a higher quality. Short wave and medium wave materials have made higher performance devices.