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提出了一种用于通用压电陶瓷线性马达(PLCM)驱动平台的纳米级定位数控方案,该平台上配有栅距 20μm的线性光栅．传统的信号细分多数基于硬件电路,无法对纳米级误差进行灵活的调整．本项研究开发了基于 Labview的数字控制系统,该系统具有失真波形的调整、1／4栅距脉冲计数、基于Lassajous圆环的波形细分、后传神经网络和PID控制以及平台的位置反馈控制等特征．介绍了定位控制的3个步骤,即用于长行程连续移动控制的 AC模式,用于低速短行程的开关模式控制马达驱动,以及以压电激励方式使马达工作的DC模式,这些步骤能够实现几纳米的精确定位．在每种运动模式下采用了专门的信号处理技术．实验结果表明,此方法可以很容易地应用于线性平台,取得小于31 nm的定位精度,9 mm行程的标准误差小于30 nm．相比于原来移动台±1μm的重复性和±1 μm／25 mm的精度,该数字控制系统能够将定位精度提高一个数量级．
A nanometer positioning numerical control scheme for a general piezoelectric linear motor (PLCM) drive platform is proposed, which is equipped with a linear grating with a grating pitch of 20μm. Most of the traditional signal segmentation based on the hardware circuit, can not be flexible on the nano-scale error adjustment. This study developed a digital control system based on Labview, which has the following features: distortion waveform adjustment, 1/4 pitch pulse counting, waveform subdivision based on Lassajous ring, back propagation neural network and PID control and platform position feedback control And so on. The three steps of positioning control are described: AC mode for long-stroke continuous-motion control, switch-mode control motor for low-speed short-stroke, and DC mode for piezo-excitation to operate the motor. These steps enable Accurate positioning of a few nanometers. Specialized signal processing techniques are used in each sport mode. Experimental results show that this method can be easily applied to a linear platform with less than 31 nm positioning accuracy and less than 30 nm standard error for 9 mm travel. The digital control system improves positioning accuracy by an order of magnitude compared to ± 1 μm repeatability and ± 1 μm / 25 mm accuracy of the original mobile station.