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提出了一种新颖的基于硅基法布里珀罗微腔阵列的光读出红外热成像器件 ,该器件利用光学读出技术将红外图像直接转化为可见光图像 ,其焦平面阵列 (FPA)是一个基于微机电系统 (MEMS)制作的法布里珀罗微腔阵列。阐明了器件的工作原理 ;完成了可动微镜结构、热机械、可见光读出部分设计。理论分析表明 ,对Al/SiO2 双材料体系而言 ,SiO2 厚度应大于 0 .3μm ,其最佳厚度比为 0 .5 98,相应的最大热 机械灵敏度可达 10 -8m/K。采用体硅微机电系统技术 ,实验制作出了 5 0× 5 0焦平面阵列。
A novel light sensing infrared thermal imaging device based on silicon-based Fabry-Perot micro-cavity array is proposed. The device uses optical readout technology to directly convert the infrared image into a visible light image. The focal plane array (FPA) is A Fabry-Perot Microcontrolled Array Based on Micro-Electro-Mechanical Systems (MEMS). Clarified the working principle of the device; completed the design of movable micromirror structure, thermal mechanical and visible light readout. Theoretical analysis shows that for Al / SiO2 dual-material system, the thickness of SiO2 should be greater than 0.3μm, the best thickness ratio is 0.5898, and the corresponding maximum thermomechanical sensitivity is 10 -8m / K. Using bulk silicon micro-electromechanical system technology, experimentally produced a 500 × 5 0 focal plane array.