论文部分内容阅读
本文报告了硅单晶中替位碳红外吸收带温度特性和光谱分辨率对碳带特征参数影响的研究结果.在 80～310K温度范围,碳带半宽度随测量温度降低而线性减小,吸收系数和峰位分别随温度下降而线性增加和有规律地向高频方向移动;液氮温度时碳带吸收系数较室温增加一倍;低于液氮温度时碳带特征参数不随测量温度而变.不同光谱分辨率(1-4cm~(-1))测量结果表明:碳带吸收系数和半宽度分别随光谱分辨率提高增加和减小.室温和液氮温度碳含量的定量测量,光谱分辨率分别以2cm~(-1)和1cm~(-1)为宜.
In this paper, we report the results of the research on the influence of the temperature and spectral resolution of carbon infrared bands in silicon single crystals on the characteristic parameters of ribbons.When the temperature is in the range of 80-310K, the half-width of ribbon decreases linearly with decreasing the measured temperature, The coefficient and the peak position increase linearly with the decrease of temperature and regularly move to high frequency. The absorption coefficient of carbon band in liquid nitrogen double the room temperature. The characteristic parameters of carbon ribbon below liquid nitrogen temperature do not change with the measurement temperature The measurement results of different spectral resolution (1-4cm -1) show that the absorption coefficient and half width of carbon band increase and decrease with the increase of spectral resolution respectively.The quantitative determination of carbon content at room temperature and liquid nitrogen temperature and the spectral resolution Rates were 2cm ~ (-1) and 1cm ~ (-1) is appropriate.