Displacement sensor based on polarization mixture of orthogonal polarized He-Ne laser at 1.15μm

• 作 者: 赵正启 张书练 张鹏 曾召利 谈宜东 李岩
• 机 构: State Key Laboratory of Precision Measurement Technology and Instruments,Department of Precision Ins
• 出 处: Chinese Optics Letters
• 发表日期: 2012年03期
• 关键词: tuning polarized linearity excitation mirror length distortion irregular judgmen

Displacement sensor based on the polarization mixture and the cavity tuning of the orthogonal polarized He-Ne laser 1.15μm is presented.The power tuning curves of He-Ne laser are irregular,and it is difficult to measure the change in cavity length.The distortion of the curves is caused by the higher relative excitation compared with the He-Ne laser at 633 nm.In view of its potential for the wider displacement measuring range,a new method of displacement sensing is developed.Experiments show that displacement measuring stability based on the method of the polarization mixture is better than that of the power tuning curves. The displacement sensor achieves the measuring range of 100 mm,resolution of 144 nm,and linearity of 7×10-6 .

Displacement sensor based on the polarization mixture and the cavity tuning of the orthogonal polarized He-Ne laser 1.15 μm is presented. The power tuning curves of He-Ne laser are irregular, and it is difficult to measure the change in cavity length. Distortion of the curves is caused by the higher relative excitation compared with the He-Ne laser at 633 nm. view of its potential for the wider displacement measuring range, a new method of displacement sensing is developed. Experiments show that displacement measuring stability based on the method of the polarization mixture is better than that of the power tuning curves. The displacement sensor achieves the measuring range of 100 mm, the resolution of 144 nm, and the linearity of 7 × 10 -6.