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TiAlN薄膜具有硬度高、附着力强及热稳定性好等优良特性,被广泛用于涂层刀具中。钽(Ta)是一种硬度高、韧性好、熔点高的过渡金属元素,经常用于提高合金的抗高温氧化性能。将Ta与TiAlN制成多层膜,有可能获得更好的力学性能及热稳定性。清华大学摩擦学国家重点实验室和武汉材料保护研究所的研究人员设计并制备了TiAlN/Ta多层膜,研究了其力学性能及热稳定性。该文发表在《Applied Surface Science》2014年第310卷。论文首先介绍了TiAlN/Ta多层膜的结构及制
TiAlN film with high hardness, adhesion and good thermal stability and other fine features, are widely used in coating tools. Tantalum (Ta) is a high hardness, toughness, high melting point transition metal elements, often used to improve the high temperature oxidation resistance of the alloy. Making multilayer films of Ta and TiAlN makes it possible to obtain better mechanical properties and thermal stability. Researchers at State Key Laboratory of Tribology, Tsinghua University, and Wuhan Institute of Materials Protection designed and prepared TiAlN / Ta multilayers to study their mechanical properties and thermal stability. This article is published in Applied Surface Science, Vol. 310, 2014. The paper first introduces the structure and system of TiAlN / Ta multilayers