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用电子探针显微分析的方法进行氧的直接定量,对于催化剂的研究和化工产品的分析鉴别等有一定的实际意义,但由于氧和其它超轻元素的特点,其定量至今仍是电子探针分析中的难题。氧化物体系的很多试样由于导电不良,需表面喷涂导电层(如碳等)。另外,试样在电子探针分析仪中由于真空系统的残留扩散泵油蒸气造成的碳污染也使试样中各元素的x射线强度受到影响。本文试验了同时监测Cka强度的外推校正方法,即在WDS的自动程序方式下连续进行多次的CKa,OKa及其它谱线的强度测量(包括峰强度和本底测量),将各谱线的每次强度值对每次Cka强度值作图外推至Cka强度为零时所得强度值分别视作相当于无碳覆盖时的强度值,实际可用计算机程序按回归分析进行外推计算(外推公式
The direct quantitative determination of oxygen by electron probe microanalysis has some practical significance for catalyst research and chemical product analysis and identification. However, due to the characteristics of oxygen and other ultra-light elements, the quantitative determination of oxygen is still an electronic exploration Needle analysis of the problem. Many samples of oxide system due to poor conductivity, surface coating of conductive layer (such as carbon, etc.). In addition, the sample in the electronic probe analyzer due to residual vacuum system diffusion pump oil vapor pollution caused by the elements of the sample also affected the x-ray intensity. In this paper, an extrapolation method for simultaneous monitoring of Cka intensities is tested. The intensity of CKa, OKa and other spectra (including peak intensities and background measurements) are continuously measured multiple times in WDS automatic programming mode. Of each intensity value for each Cka intensity value extrapolation to Cka strength zero when the resulting intensity values were treated as equivalent to the intensity of carbon-free coverage, the actual computer program can be calculated by regression analysis of extrapolation (outside Push the formula